Mass Flow Controller MODEL Kofloc 3200 SERIES
Perhatian!
Spesifikasi Mass Flow Controller MODEL Kofloc 3200 SERIES
MODEL 3200 SERIES
Features
· Equipped with a temperature follow-up type current difference detection flow sensor (patent applied for) to ensure high accu-racy and high-speed response
· Use of a normally closed valve to ensure safety
· Reduced dead volume thanks to the diaphragm seat valve
· Control of small quantities of flows available up to 1 SCCM fullscale (SR option)
· Low differential pressure type control available for combustiblegases (LP option)
Standard Specifications
|
Flow range (N2 equivalent, |
1 SCCM–20 SLM (The conditions are freely selectable) |
|
Sensor |
Thermal mass flow sensor |
|
Valve type |
Proportional solenoid valve (closed when not energized) |
|
Control range |
2–100% (F.S.) |
|
Response |
1 sec. or less (0–100% within ±2% typical) |
|
Accuracy |
±1% F.S. (Accuracy guaranteed at 15–35℃) |
|
Repeatability |
±0.2%F.S. |
|
Operating differential |
F.S. ≤ 5 SLM: 50–300 kPa (G) |
|
F.S.> 5 SLM: 100–300 kPa (G) |
|
|
Option: Low differential pressure (LP) specification is avaible depending on conditions. |
|
|
Allowable operating pressure |
300 kPa (G) or less |
|
Proof pressure |
980 kPa (G) |
|
Leak rate |
1 × 10-8 Pa·m3/s or less (excluding permeation of He) |
|
Allowable ambient |
0–50℃ |
|
Allowable ambient humidity |
10–90% (No condensation allowed) |
|
Materials of parts in |
Body: SUS316L |
|
Diaphragm: SUS316 |
|
|
Valve seat: FKM (option: CR, NBR or perfluor) |
|
|
Sealing: FKM (option: CR, NBR or perfluor) |
|
|
Electric connection |
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) |
|
Flow rate input signals |
0–5 VDC (Input impedance: 1 MΩ or more) |
|
Flow rate output signals |
0–5 VDC (External load resistance: 250 kΩ or more) |
|
Required power supply |
+15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA |
|
Joint (Main unit bore) |
Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc. |
|
Weight |
Approx. 1000 g |
!!Note !!
Specifications relating to the flow range (e.g., flow range, accuracy and re-sponse) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.
Harnest Layout
Pin Assigment of Dsub 9-pin Connector per KFC Standard
|
Pin No |
Signal |
Pin No. |
Signal |
|
1 |
Input valve open/close operation |
6 |
Flow input Hi |
|
2 |
Flow output 0-5 V |
7 |
Flow output COM |
|
3 |
+15 VDC power source |
8 |
Flow input Lo |
|
4 |
Power source COM |
9 |
NC |
|
5 |
|
|
|
Untuk informasi lebih lanjut silakan hubungi :
PT. Wiratama Mitra Abadi
Jl. Dewi Kunti II No. 2 Kalimalang - Bekasi
Kantor Cabang :
Perumnas Teluk Jambe Block C No. 53
Phone : 085 100 711 033, 085 105 062 090
Mobile : 6287780553773, 62812 8208 4779
Email : sales@wmablog.com
Website : www.flowmasonic.com
Blog : www.wmablog.com
Skype : Wiratama Mitra Abadi
WA : 081218618184
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