Kofloc Pressure Regulator Valve (Precision Regulator for Low Pressure Regulation) MODEL 6610
Perhatian!
Spesifikasi Kofloc Pressure Regulator Valve (Precision Regulator for Low Pressure Regulation) MODEL 6610
MODEL 6610
This valve has been developed for better repeatability and quick, reliable pressure regulation by increasing the ac-
curacy of the low-pressure side compared with the Model 6600. It is ideal for high-sensitivity analyzers and semiconductor manufacturing equipment, as well as for research and development.
Features
-High-precision regulation on the low-pressure side
High regulation performance with repeatability of ±1% or less when
- Non-grease specification
The sections in contact with gas are made of stainless steel, Viton,
- Lock nut
The regulating position, once it has been set, can be fixed by a lock
- Non-bleed type
This non-bleed type valve prevents gas from leaking to the outside
Applications
-Gas chromatography
- High-purity gas control
- Low-pressure controllers
- Semiconductor industry
Standard Specifications
Fluids |
Various gases |
Maximum primary pressure |
0.4MPa |
Secondary control pressure |
0.01-0.15MPa |
Maximum flow |
5L/MIN |
Minimum operating differential |
0.1 MPa or more |
Materials of parts in contact with gases |
SUS316, FKM, fluorocarbon resin, SUS304, SUS303 |
Proof pressure |
0.8MPa |
Repeatability |
Within ±1% of the pressure rating |
Heat resistance |
5°C-60°C |
Connection end |
Rc1/8 |
Materials of parts in contact with fluids
|
SUS316, FKM, fluorocarbon resin, SUS304, |
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