Kofloc Pressure Regulator Valve (Precision Regulator for Low Pressure Regulation) MODEL 6610

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28-11-2017
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Spesifikasi Kofloc Pressure Regulator Valve (Precision Regulator for Low Pressure Regulation) MODEL 6610

 Pressure Regulator  Valve (Precision Regulator  for Low Pressure Regulation)

MODEL 6610

This valve has been developed for better repeatability and quick, reliable pressure regulation by increasing the ac-

curacy of the low-pressure side compared with the Model 6600. It is ideal for high-sensitivity analyzers and semiconductor manufacturing equipment, as well as for research and development.

Features

-High-precision regulation on the low-pressure side

High regulation performance with repeatability of ±1% or less when the pressure on the primary side and load resistance on the secondary side change under the set pressure condition of 0.01–0.15 MPa.

- Non-grease specification

The sections in contact with gas are made of stainless steel, Viton, and Teflon without using grease. This valve is ideal for the semiconductor industry which requires ultra-clean conditions.

- Lock nut

The regulating position, once it has been set, can be fixed by a lock nut to prevent the setting from changing.

- Non-bleed type

This non-bleed type valve prevents gas from leaking to the outside

Applications

-Gas chromatography

- High-purity gas control

- Low-pressure controllers

- Semiconductor industry

Standard Specifications

Fluids

Various gases

Maximum primary pressure

0.4MPa

Secondary control pressure

0.01-0.15MPa

Maximum flow

5L/MIN

Minimum operating differential

0.1 MPa or more

Materials of parts in contact with gases

SUS316, FKM, fluorocarbon resin, SUS304,

SUS303

Proof pressure

0.8MPa

Repeatability

Within ±1% of the pressure rating

Heat resistance

5°C-60°C

Connection end

Rc1/8

Materials of parts in contact with fluids

 

SUS316, FKM, fluorocarbon resin, SUS304,SUS303

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